Correlation of Structural Modifications by Multiscale Phase Mapping in Filamentary Type HfO2-based RRAM: Towards a Component Specific in situ TEM Investigation

Authors: Alexander Zintler, Robert Eilhardt, Stefan Petzold, Nico Kaiser, Sharath Ulhas, Lambert Alff, Leopoldo Molina-Luna

Journal: Microscopy and Microanalysis

DOI: https://doi.org/10.1017/s1431927619009942