The Relationships of Microscopic Evolution to Resistivity Variation of a FIB-Deposited Platinum Interconnector

Authors: Chaorong Zhong, Ruijuan Qi, Yonghui Zheng, Yan Cheng, Wenxiong Song, Rong Huang

Journal: Micromachines

DOI: https://doi.org/10.3390/mi11060588