MEMS-based sample carriers for simultaneous heating and biasing experiments: A platform for in-situ TEM analysis

Authors: Héctor Hugo Pérez Garza, Yevheniy Pivak, Leopoldo Molina Luna, J. Tijn van Omme, Ronald G. Spruit, Mariya Sholkina, Merijn Pen and Qiang Xu

Journal: 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

DOI: https://doi.org/10.1109/transducers.2017.7994502