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TEM sample preparation using micro-manipulator for in-situ MEMS experiment

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TEM sample preparation using micro-manipulator for in-situ MEMS experiment

Authors: Hyunjong Lee, Odongo Francis Ngome Okello, Gi-Yeop Kim, Kyung Song, Si-Young Choi

Journal: Applied Microscopy

DOI: https://doi.org/10.1186/s42649-021-00057-8

Abstract

Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.
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